Structural and thermal modeling of a z-axis rate integrating gyroscope

This paper presents results of structural and thermal modeling of a z-axis rate integrating gyroscope. A strain energy method is used to obtain a structural model of the device, which is verified using finite element analysis. Based on a parametric analysis, an appropriate micromachining technology suitable for the fabrication of the gyroscope is identified. A sensitivity study shows that the operational modes of the proposed gyroscope remain matched under thermal and stress fluctuations, whereas a device with a commonly used H-type suspension shows a 31% frequency mismatch under thermal loading of 23.67 ◦C or 9 MPa of compressive stress. (Some figures in this article are in colour only in the electronic version)